Focused Ion Beam (FIB) and Focused Electron Beam Induced Deposition (FEBID) for advanced nanocharacterization and nanofabrication

Focused Ion Beam (FIB) combined with scanning electron microscope (SEM) is a powerful and versatile instrument for the nanoscience lab. Besides the well-established capabilities in sample preparation for transmission electron microscopy (TEM), cross-section material analysis, device prototyping and sample nanomachining, the recent developments in beam-induced deposition using gas precursors have opened interesting perspectives in 3D nanofabrication, nanomagnetism and sensors. In this keynote lecture, the latest advances and applications of these techniques will be reviewed.