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Milano Bicocca 

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TT.VI.A

sveglia 16:00 - 17:30

Nano-characterizations in semiconductor’s industry
SYNOPSIS
TT.VI.A.1

Giacomo CALLORI
Sapienza University of Rome & LFOUNDRY, Avezzano (AQ)
SRAM fault modeling simulation

TT.VI.A.2

Iuliana RACHITA
Sapienza University of Rome & LFOUNDRY, Avezzano (AQ)
Characterization of Implanted Si wafer by RAMAN spectroscopy

TT.VI.A.3

Matteo ANGIOLILLO
Sapienza University of Rome & LFOUNDRY, Avezzano (AQ)
e-PDF capability evaluation for structural analysis of amorphous & nano-crystalline materials in semiconductor industry

TT.VI.A.4

Mattia MUSOLINO
LFOUNDRY, Avezzano (AQ)
Mercury probe as a tool for prompt oxide characterization in semiconductor industry

TT.VI.A.5 Narciso GAMBACORTI  CV
CEA Leti/PAC-G, Grenoble, France
3D characterization of advanced nanoelectronic devices  abst
Chair: Onofrio Antonino CACIOPPO, LFoundry, Avezzano (AQ)
  
 In collaboration with: LFoundry

SYNOPSIS


The requirement of Semiconductor’s industry to manufacture products with ever greater performances and high quality and reliability standards, is an incessant stimulus to individuate and use analytical solutions capable to characterize processes and materials  in the early manufacturing process stage. Driving factors for their success are cost and integrability to the production line, in such a way to feedback the manufacturing process. In this context in the session are presented the results of Raman Spectroscopy, e-PDF Analysis and Mercury Probing applications. The individuation of the potential failure modes by fault modeling simulation is presented too since it is powerful application to anticipate or validate failure mechanisms on final products.


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